Edwards STP-iXA2206C渦輪分子泵
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產(chǎn)品名稱(chēng): Edwards STP-iXA2206C渦輪分子泵
產(chǎn)品型號(hào): YT810Z010
產(chǎn)品展商: Edwards
產(chǎn)品文檔: 無(wú)相關(guān)文檔
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Edwards STP-iXA2206C渦輪分子泵
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Edwards STP-iXA2206C Turbomolecular Vacuum Pump - NEW
The STP-iXA2206 series magnetically levitated turbomolecular pump provides industry-leading performance and incorporates a small power supply into the onboard control unit – the latest technology of the well-established STP-iXA2205 series. The height of the pump is equal to the STP-A2203C and is also equal to the height of the STP-iXA2205 series without it’s power supply (iPS-1200). This fully integrated product offers easy installation and a small footprint as an all-in-one solution for all application tools.
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Compact design including a fully integrated controller
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Innovative, self-sensing magnetic bearing system
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Digital 5-axis control
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Vibration levels reduced by 50% compared to the existing turbo pumps
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Can be configured to run corrosive processes
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Inlet flange size
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ISO250F / VG250 / ICF305
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Backing port size
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KF40
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Pump speed N2 / Ar
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2,200/1,900 l/s
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Compression ratio N2 / H2
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> 108 / 1 x 104
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Ultimate pressure
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10-7 Pa (10-9 Torr)
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Allowable backing pressure
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266 Pa (2 Torr)
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Max gas flow N2 * (water cooled only)
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3,000 sccm
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(5.07 Pam3s-1)
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Max gas flow Ar * (water cooled only)
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1,400 sccm
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(2.36 Pam3s-1)
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Rated speed
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27,000 rpm
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Run-up time to 90% rated speed
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< 8 minutes
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Mounting position
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Any orientation
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Input voltage
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200-240 V
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Max input power (without TMS)
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1,200 VA
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Weight
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62 kg
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STP-Link with 3m cable
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