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產(chǎn)品名稱: Edwards STPXA4503C磁懸浮分子泵
產(chǎn)品型號(hào): YT670Z000
產(chǎn)品展商: Edwards
產(chǎn)品文檔: 無相關(guān)文檔
簡(jiǎn)單介紹
Edwards STPXA4503C磁懸浮分子泵
的詳細(xì)介紹
Edwards STP-XA4503C Turbomolecular Vacuum Pump - NEW
The STP-XA4503C magnetic bearing turbomolecular pump has a wide process window, from high vacuum, to high flow requirements with enhanced throughput for all gases.
This pump is based on a new design, offering features to improve thermal management, which enhances performance on harsh processes, increases the maximum process flow capability and reduces the effects of corrosion and deposition.
It has been designed to handle light and harsh duty applications, such as etch, implant, lithography and FPD processes.
Advanced Rotor Design
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Increased Argon performance
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Highest pumping speed in its class
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Wide process window
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Higher throughput at lower pressure
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Maintenance free
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Harsh process compatible
5-Axis Magnetic Suspension System
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Zero contamination
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Low vibration
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High reliability
Optimized Temperature Distribution
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Low deposition
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Built-in cooling mechanism
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Higher gas throughput
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Increased operating life
Certifications
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Conforms to international safety standards
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UL listed, CE marked and SEMI® S2 compliant
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Inlet flange
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VF-300 / ISO-320F / VG-350
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Backing port
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KF-40
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Pumping speed
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N2
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3,800 l/s
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H2
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2,500 l/s
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Compression ratio
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N2
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> 108
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H2
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> 6 x 103
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Ultimate pressure
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10-7 Pa
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Max. allowable backing pressure
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266 Pa
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Max. allowable gas flow
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N2 (water cooled)
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2,800 sccm (4.73 Pam3s-1)
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Ar (water cooled)
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2,150 sccm (3.63 Pam3s-1)
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Rated speed
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27,500 rpm
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Starting time
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12 min
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Mounting position
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Any
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Water cooling
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Flow
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3 l/min-1
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Pressure
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0.3 MPa
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Temperature
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5 - 25°C
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Input voltage
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200 to 240 VAC
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Recommended purge gas flow
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50 sccm
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Input voltage
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200 to 240 VAC
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Max input power
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1.5 KVA
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Edwards STP-XA4503C Turbomolecular Vacuum Pump - NEW
P/N YT67-0Z-040 / YT670Z040 STP-XA4503C ISO-320F
|
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|
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|
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|
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